CFD-ACE+ Plasma Training


概要

This course presents the modeling of Capacitively Coupled Plasma (CCP) and Inductively Coupled Plasma (ICP) reactors with hands-on exercises as well as an introduction to feature scale modeling with CFD-TOPO.

対象

Mechanical, Chemical and Plasma engineers with a basic understanding of CFD-ACE+

目的

Learn to model real-world plasma discharge/process in a way that is physically proper and numerically attractable

要件

Working knowledge of CFD-ACE+ tools

コースの詳細

Day 1, AM:

  • Overview of Plasma Applications and Modeling
    • Plasma types and applications
    • Introduction to Plasma Modeling
    • Basic Equations of the Plasma Fluid Model
    • Simplification for Inductively Coupled Plasma
    • Plasma Gas-Phase Chemistry
    • Plasma Surface Chemistry
    • Diffusivity and Mobility
    • Neutral Gas Heating by Plasma
    • Ion Surface Heating
  • CFD-ACE database

Day 1, PM:

 

 

  • Tutorial 1: CFD-ACE+ Plasma Modeling of 2D CCP Reactor

     

    • Problem Type
    • Model Options
    • Volume Conditions
    • Boundary Conditions
    • Initial Conditions
    • Solver Control
    • Output
    • Run and Monitor
    • DTF update through Model.in
    • View and Analyze results using CFD-VIEW
  • Discussion and Further Exercises in CCP

     

    • Ion Momentum Equation
    • Cross-Section Based Electron Collision
    • Fixed CCP power

Day 2, AM:

 

 

 

  • Introduction to Kinetic Modeling

     

    • Hierarchy of Transport Models for Electrons
    • 4-D Fokker-Planck Equation
    • CFD-ACE+ Kinetic model definition
    • Plasma Coefficients by Kinetic
  • Tutorial 2: Modeling of 2-D Axisymmetric SiO2 Deposition Process in SiH4/O2/Ar ICP Reactor

     

    • Problem Type
    • Model Options
    • Volume Conditions
    • Boundary Conditions
    • Initial Conditions
    • Solver Control
    • Output
    • Run and Monitor
    • DTF update through Model.in
    • View and Analyze results using CFD-VIEW
  • Discussion and Further Exercises in ICP

     

    • Thermal Flux Balance BC for Te
    • Fixed ICP Power
    • Ion Kinetic Energy + Joule Heating for Gas

Day 2, PM:

Introduction to feature Scale Modeling with CFD-TOPO and its Coupling with Reactor Scale

OPEN TIME: Discussions, Q & A Session and work on models provided by the trainees (students are highly encouraged to bring their own cases)

 
トレード: 
CFD
 
Reference: 
CFD-AP-A
 
レベル: 
Advanced
 
期間: 
2 days
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