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  3. CFD-ACE+ and CFD-TOPO Coupling

CFD-ACE+ and CFD-TOPO Coupling

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by Abraham Meganathan on 25 Jul 2006
figure5.jpg
There is a growing demand and challenge in different industries, especially semiconductor and MEMS areas, to have increased wafer size with reduced feature size, i.e. high quality process uniformity.
 
Product: 
CFD-TOPO
 
Trade: 
CFD

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