Tips & Tricks

CFD-ACE+ and CFD-TOPO Coupling

There is a growing demand and challenge in different industries, especially semiconductor and MEMS areas, to have increased wafer size with reduced feature size, i.e. high quality process uniformity.

DTF utility: the -vd and -ud options

The DTF utility offers several options for viewing and manipulating simulation data in a DTF file. Simulation data is essentially all settings that are not Volume Conditions or Boundary Conditions. By using a couple of DTF commands, you can update the data in the DTF file without opening it in CFD-ACE-GUI. In this tip, we will demonstrate how to use the -vd and -ud options of the DTF utility.

CFD-TOPO: A Tool for Feature Scale Simulation of Semiconductor Processes

CFD-TOPO is a simulation tool that predicts how the shape of entities change due to the combined effects of chemical species transport and surface reactions at gas-solid interfaces. This application provides a wide array of tools to analyze the steps of a semiconductor process on the feature scale of a device (typically the order of micro-meter).

File Based Animation with CFD-VIEW

The animation panel in CFD-VIEW can be used for file-based animations, where time dependent data files are loaded one by one to show the temporal aspects of the simulation.